Advanced Raman imaging for wafer characterisation

WITec debuts alpha300 Semiconductor Edition

Oxford Instruments WITec has introduced the alpha300 Semiconductor Edition, a specialised Raman microscope tailored for semiconductor research and development. Equipped with a large-area scanning stage, wafer chuck options, and an advanced workflow manager, this edition is designed to enhance the efficiency of measurements.

In the highly competitive pursuit of understanding semiconductor properties, the alpha300 Semiconductor Edition utilises WITec's technological expertise to support researchers in swiftly characterising chemical composition, crystal quality, strain, and doping on wafers of up to 300 mm (12 inches).

“We started with an alpha300, greatly expanded its scan range, and added software for intuitively defining and sequencing experiments,” said WITec Product Manager Thomas Dieing. “This produced an instrument that can examine the biggest wafers with the same precision and convenience as a sample on a microscope slide.”

The alpha300 Semiconductor Edition confocal Raman microscope includes active vibration damping, optical profilometer-driven focus stabilisation, and comprehensive automation for standardising measurement procedures and remote operation in controlled environments.

“This is the first of our Focus Editions, a line of pre-configured, application-centred systems that neatly package the benefits we can offer a particular industry,” said Harald Fischer, Marketing Director at WITec. “The alpha300 Semiconductor Edition is set up to hit the ground running with groups investigating large semiconductor wafers.”

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