New FIB-SEM enhances automated TEM sample prep

The Crossbeam 550 Samplefab from Zeiss is a focused ion beam scanning electron microscope (FIB-SEM), designed for automated transmission electron microscopy (TEM) sample preparation. Engineered for speed and reliability in semiconductor research, the system streamlines bulk milling, lift-out, and thinning, ensuring high precision and efficiency. With automation yields exceeding 90%, the Crossbeam 550 Samplefab minimises operator intervention while maximising lamella success rates.

TEM analysis plays a critical role in semiconductor device characterisation and process optimisation, but the accuracy and consistency of results depend on high-quality lamellae. The Crossbeam 550 Samplefab addresses this challenge with advanced automation that reduces manual workload and enhances throughput.

“To meet the growing demand for reliable and efficient TEM sample preparation, we developed the Crossbeam 550 Samplefab with a focus on automation and ease of use,” said Dr Thomas Rodgers, Head of Business Sector Electronics at Zeiss Microscopy. “This system enables fully unattended processing of ultra-thin lamellae, ensuring exceptional accuracy and reproducibility. Its newly designed user interface offers an intuitive experience for both new and experienced operators, allowing ten lamellae to be prepared in under eight hours.”

The system incorporates the Gemini 2 electron column, enabling real-time SEM observation during FIB milling. This feature ensures optimal lamella quality and precise endpointing, particularly for applications requiring ultrathin samples beyond standard automated processes.

“Our FIB column delivers outstanding stability, reducing the need for frequent calibration or realignment. Many users report weeks of uninterrupted operation, even in high-throughput environments,” Rodgers added. “The system’s robust workflow allows dozens of lamellae to be created using a single probe tip, which requires reshaping only after extended use. A quick reshaping procedure restores tip performance in under 30 minutes, and complete tip exchanges take just half an hour - maximising uptime and lowering operational costs.”

More information online