XY Piezo Nanopositioners with Frictionless Flexure Guidance for Extreme Precision Applications

A new series of XY piezo nanopositioners for extreme precision applications has been introduced by Aerotech. The QNP-XY stages provide the highest resonant frequency and stiffness of positioners with comparable size and travel, the company reports. This allows users to achieve higher throughput in exacting processes.

With resolution to 0.15 nm, linearity to 0.007% and repeatability to 2 nm, the stages meet the most demanding requirements of applications from microscopy to optics alignment. They are offered in travel ranges from 100 µm to 600 µm.

QNP piezo stages are guided by frictionless precision flexures that are optimised using finite element analysis for fast closed-loop response. The integrated XY package minimises stack height and moving mass, resulting in superior static and dynamic multi-axis performance.

When coupled with Aerotech’s Q-series controllers and drives, the stages demonstrate sub-nanometer positioning resolution and in-position stability, and high-positioning bandwidth. They are available with or without capacitance sensor feedback and a wide range of software options.

Aerotech is a leading global supplier of positioning and motion control products for industry, government, science and research institutions. Its products provide critical performance for demanding applications requiring high precision, high-throughput motion control solutions.