The Phenom XL Scanning Electron Microscope (SEM) pushes the boundaries of compact desktop SEM performance

The Phenom XL Scanning Electron Microscope (SEM) features the proven ease-of-use and fast time-to-image of any Phenom system. It is also equipped with a chamber that allows analysis of large samples up to 100 mm x 100 mm. A proprietary venting/loading mechanism ensures the fastest vent/load cycle in the world, providing the highest throughput. A newly developed compact motorised stage enables the user to scan the full sample area, and yet the Phenom XL is a desktop SEM that needs little space and no extra facilities. Ease-of-use is given an extra boost in the Phenom XL with a single-shot optical navigation camera that allows the user to move to any spot on the sample with just a single click – within seconds.

Phenom XL

The Phenom XL features a newly designed chamber including a compact motorised stage that allows analysis of samples of up to 100 mm x 100 mm. In spite of this much larger sample size, a proprietary loading shuttle keeps the vent/load cycle to a minimum, which in practice enables a throughput that is a

few factors higher than any comparable SEM system. The user interface is based on the proven ease-of-use technology already applied in the successful Phenom Pro and ProX desktop SEM. The interface enables both existing and new users to quickly become familiar with the system without much training. The standard detector in the Phenom XL is a four-segment BackScatter Detector (BSD) that yields sharp images and provides chemical contrast information. The Phenom XL can be equipped with two

optional detector systems. The first one is a fully integrated EDS system for elemental analysis. The second option is a Secondary Electron Detector (SED) that enables surface sensitive imaging.

The ProSuit software application platform is also available for the Phenom XL. With the ProSuite software, and applications such as ParticleMetric, PoroMetric, FiberMetric and 3D Roughness Reconstruction the user can further analyse samples.

Elemental analysis 

Elemental analysis can be added by EDS technology already proven on the Phenom ProX. Energy Dispersive Spectroscopy (EDS) allows users to analyse the chemical composition of their samples. Detailed chemical composition can be obtained from a micro volume via a spot analysis. Elemental distribution can be visualised with the elemental mapping option. An optional Secondary Electron Detector (SED) is available for applications that require surface and topography sensitive imaging.

Step-by-step data collection

The dedicated software package Element Identification (EID) is used to control the fully integrated EDS detector. Analysis has become as easy as imaging, since there is no need to switch between external software packages or computers. The CeB6 electron source in the Phenom is used to generate the highest X-ray count rate in its market segment, allowing fast results. The EID software package allows the user to identify nearly all materials in the periodic table, starting from Boron (5) and ranging up to Americium (95). It is a perfect analysis tool for a wide range of samples and applications.

Projects can be stored locally or on the network, where they can be analysed at a later stage or offline.

The EID software package runs smart algorithms with advanced peak analysis to optimise the auto-identification functionality, while still allowing for manual adjustments by the user at any

time in the analysis process. The intuitive step-by-step process within the software helps the user to collect all X-ray results in an organised and structured way.

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