News & Views
Carl Zeiss gains ground in China
Mar 14 2013
SMIC, the largest and most advanced foundry in Mainland China, has placed an order with Carl Zeiss for a tool bundle for qualification, repair and metrology of photomasks.
The Semiconductor Manufacturing International Corporation (SMIC), headquartered in Shanghai, China, have purchased multiple systems for photomask verification, repair and metrology from Carl Zeiss Semiconductor Metrology Systems (SMS) Division, a leading supplier of both photomask metrology and manufacturing equipment.
This step is strategically very important for Carl Zeiss SMS as the semiconductor market in China is still on an emerging path." states Dr. Oliver Kienzle, CEO of Carl Zeiss SMS GmbH.
SMIC purchased an AIMS™ system for qualifying their photomasks for the advanced node and beyond. To repair the detected defects SMIC will use the ZEISS MeRiT® MG system, which allows high end mask repair based on the state-of-the-art e-beam mask repair platform. New to the SMIC production line will be the metrology tool PROVE®, which will be applied for high performance image placement measurements.
SMIC is one of the leading semiconductor foundries worldwide, providing integrated circuit (IC) foundry and technology services at 0.35-micron to 40-nanometer.
Digital Edition
Lab Asia 31.6 Dec 2024
December 2024
Chromatography Articles - Sustainable chromatography: Embracing software for greener methods Mass Spectrometry & Spectroscopy Articles - Solving industry challenges for phosphorus containi...
View all digital editions
Events
Jan 22 2025 Tokyo, Japan
Jan 22 2025 Birmingham, UK
Jan 25 2025 San Diego, CA, USA
Jan 27 2025 Dubai, UAE
Jan 29 2025 Tokyo, Japan