• Leading the Way in Optical Metrology

Microscopy & microtechniques

Leading the Way in Optical Metrology

Olympus has introduced the LEXT OLS4000, the latest version of the highly successful LEXT confocal laser scanning microscope metrology system. As well as internal functional improvements, the whole system has a sleeker look and now only requires a single control unit. The Olympus LEXT OLS4000 has been designed with a larger and faster MEMS scanning mirror along with dual pinholes, which provide the most advanced confocal laser scanning microscopy in the market. The larger mirror enables the system to provide superior optical quality, and the increased scan speed halves the time it takes to create a 3D image of a sample. The 405nm laser and dual pinholes operate simultaneously to ensure that the system provides the highest possible resolution and clarity as well as enabling steep slope detection up to 85o, ensuring that even the most complex of surface topologies can be imaged and analysed.

The new line scan function enables the LEXT to perform optical surface roughness measurements to the same international standards as cantilever-based systems. Moreover, the LEXT is leading the way in applying the new 2D surface roughness standards, taking surface analysis to the next level of precision. The new Z-drive provides movement steps of under 1nm providing an accuracy of 10nm, which ensures that 3D measurements are extremely precise and repeatable. The new stage also enables much more precise movement and the instrument has a built in vibration cancellation system, ensuring that accuracy is not affected by sample navigation or external vibrations. The completely new software, builds upon the concept of making complex optical metrology processes accessible to all users. Reporting is also exceptionally easy, with an intuitive report generator ensuring that data is always presented in the best possible way. What is more, each user can be assigned their own login and therefore their specific settings, files and projects are immediately available to them. This ensures that multi-user groups are free to define individual setups and that there is enhanced data security, both between users and groups.


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