New Linear Motor Nanopositioner Provides High Accuracy and Repeatability

A series of linear dual-axis stages offering nanometer-level performance in travels up to 160 x 160mm has been introduced by Aerotech. The new ANT130-XY stages allow travel in two dimensions with an exceptionally low profile of 85mm. With high resolution (1nm), repeatability (75nm) and accuracy (250nm) per axis, the stages support all applications that require nanopositioning performance with extreme in-position stability and  smooth motion.

The ANT130-XY stages are designed for use in a wide range of research and development and manufacturing fields. These include data storage, semiconductor, laser micromachining, medical, sensor testing, inspection, material deposition and MEMS/nanotechnology device fabrication.

The stages use Aerotech’s proprietary advanced direct-drive technology as well as crossed-roller bearings to achieve the highest level of positioning performance. The direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable motion in both the X and Y dimensions. All travel options (60mm x 60mm, 110mm x 110mm, 160mm x 160mm) come with the 85mm profile height.

The ANT130-XY design allows critical elements such as orthogonality, straightness and flatness to be optimised, resulting in a stage with exceptional geometrical tolerances. Its integrated cable management system is designed to
minimise drag forces.

The new stage can be combined with other Aerotech ANT series products – such as vertical lift stages, direct drive rotaries and goniometers – to create unique high-performance multi-axis nanopositioning systems.