Programmable bake plate for 12” silicon wafers

Torrey Pines Scientific, Inc. announces the WaferPlate™ Model HP90, a cutting-edge programmable bake plate designed specifically for 12” (304.8 mm) and smaller silicon wafers. With superior temperature uniformity exceeding 1% across the central 12” (304mm) surface, this innovative solution is ideal for various applications, including heating electronic chips, displays, adhesives, and working with photo-resists.

The HP90 features a spacious circular 13.875” (352.4mm) milled-flat plate aluminium surface, ensuring precise temperature control for 12” or smaller silicon wafers. The unit can be conveniently controlled remotely via RS232 I/O port through a PC or industrial controller, offering a command set for seamless integration. Additionally, the bench-top controller, fully programmable and capable of storing 5 routines with 10 steps each in memory, provides instant and repeatable recall for efficient usage. Programs can be set to repeat automatically from 1 to 98 times or infinitely.

With a temperature range from room temperature to 350°C, the plate surface can be set and controlled directly to 1°C, guaranteeing accuracy within 1% of the heater setting across the entire range. The platinum RTD built into the heater plate ensures reliable temperature sensing. The HP90 further offers temperature ramping from 1°C/hour to 450°C/hour, a countdown timer with an alarm, user-settable Auto-Off, and an RS232 I/O port. The units come with temperature calibration certificates traceable to NIST.

Available in 100, 115, and 230 VAC, 1500 watts, 50/60 Hz models, the WaferPlate™ Model HP90 is pending ETL, CSA, and CE certification.

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