Ultraviolet Radiation Spectrometer

Quickly and easily measure vacuum ultraviolet spectral emission - signature emission from He, Ar, Xe, N2 and O2 and even many corrosive fluoride or chloride-based mixtures, in experiments as diverse as: plasma process mapping (semiconductor etch plasma formation and distribution); fluorescence (nano- materials, doped crystals); luminescence (phosphor characteristics); and VUV photoemission.

McPherson’s vacuum ultraviolet spectrometer, Model 234/302, is now complete with sensitive, cooled, scientific grade CCD detectors. The compact 200mm focal length spectrometer has adjustable slits, and operates at f/4.5, providing fast, sensitive data collection from ultraviolet radiation and emission spectra in the 100 to 190 nanometer wavelength range simultaneously, in near real time, with sub- nanometer spectral resolution.

Tune the grating to longer or shorter wavelengths to collect different wavelength swaths. Various models of cooled, back illuminated and windowless sensors fit directly to the focal plane for direct detection of vacuum ultraviolet spectra.

Furnished with spectral calibration certificate the McPherson spectrometer is available with standard light sources, reflective condenser optics, and vacuum differential sections. McPherson’s application consultation assures the ultraviolet spectrometer is ready for implementation in users application.